RELIABILITY OF PIEZOELECTRIC SCANNERS IN PROBE MICROSCOPY
https://doi.org/10.21683/1729-2646-2013-0-1-92-114
Abstract
The paper considers the issues related to the reliability of systems made up of multifunctional piezoelectric modules which depends on an automated system of control of piezoelectric scanners as a whole (and of individual piezoelectric modules), as well as on the reliability of piezoelectric modules themselves wherein electrical energy converts into mechanical energy.
About the Authors
V. A. Vasin
Moscow State Institute of Electronics and Mathematics (technical university)
Russian Federation
Russian Federation
PhD, Associate professor of the Chair of Technological Electronic Systems,
vacuumwa@list.ru, vacuumwa@ya.ru
E. N. Ivashov
Moscow State Institute of Electronics and Mathematics (technical university)
Russian Federation
Russian Federation
Doctor of technical sciences, Professor of the Chair of Technological Electronic Systems,
vacuumwa@list.ru, vacuumwa@ya.ru
S. V. Stepanchikov
Moscow State Institute of Electronics and Mathematics (technical university)
Russian Federation
Russian Federation
PhD, Associate professor and doctoral candidate of the Chair of Technological Electronic Systems,
vacuumwa@list.ru, vacuumwa@ya.ru
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Review
For citations:
Vasin V.A., Ivashov E.N., Stepanchikov S.V. RELIABILITY OF PIEZOELECTRIC SCANNERS IN PROBE MICROSCOPY. Dependability. 2013;(1):92-114. https://doi.org/10.21683/1729-2646-2013-0-1-92-114
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ISSN 1729-2646 (Print)
ISSN 2500-3909 (Online)
ISSN 2500-3909 (Online)
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