For citations:
Shakhmaeva A.R., Kardashova G.D., Kazalieva E., Yevdulov D.V. Process for sandblasting silicon slabs as part of semiconductor transistor manufacture. Dependability. 2022;22(4):23-27. (In Russ.) https://doi.org/10.21683/1729-2646-2022-22-4-23-27