RELIABILITY OF PIEZOELECTRIC SCANNERS IN PROBE MICROSCOPY
https://doi.org/10.21683/1729-2646-2013-0-1-92-114
Abstract
The paper considers the issues related to the reliability of systems made up of multifunctional piezoelectric modules which depends on an automated system of control of piezoelectric scanners as a whole (and of individual piezoelectric modules), as well as on the reliability of piezoelectric modules themselves wherein electrical energy converts into mechanical energy.
About the Authors
V. A. Vasin
Moscow State Institute of Electronics and Mathematics (technical university)
Russian Federation
Russian Federation
PhD, Associate professor of the Chair of Technological Electronic Systems,
vacuumwa@list.ru, vacuumwa@ya.ru
E. N. Ivashov
Moscow State Institute of Electronics and Mathematics (technical university)
Russian Federation
Russian Federation
Doctor of technical sciences, Professor of the Chair of Technological Electronic Systems,
vacuumwa@list.ru, vacuumwa@ya.ru
S. V. Stepanchikov
Moscow State Institute of Electronics and Mathematics (technical university)
Russian Federation
Russian Federation
PhD, Associate professor and doctoral candidate of the Chair of Technological Electronic Systems,
vacuumwa@list.ru, vacuumwa@ya.ru
References
1. Howland Rebecca, Benatar Lisa. A Practical Guide to Scanning Probe Microscopy / Project Editor and Booklet Designer: Christy Symanski // Copyright 1996 by Park Scientific Instruments. – 76 p.
2. Bykov В.А., Lazarev M.I., Saunin S.A. Scanning probe microscopy for science and industry. // Electronics: science, technology, business, № 5, p. 7 – 14 (1997).
3. Bykov V.A. Scanning probe microscopy of atomic resolution and modeling of processes for molecular nanotechnology // the Second International scientific and technical conference “Microelectronics and computer science”: Thesis of reports. – Moscow-Zelenograd, 23-24 November, 1995 – p. 131.
4. Bykov V.A. Technology and equipment for experimental works in the field of nanophysics and nanoelectronics // Scientific session of MiFi – 2010. The collection of proceedings. – 2010, V.2. – p.119.
5. Rabek Y.E. Experimental approaches in photochemistry and the photophysics. 2 volumes.V. 1. Tr. from English – М.: the World, 1985. – 608 p.
6. Sushchara K., Mory I., Tobse T., Ito T., Tabsta M., Cinodzaky T. Piezoelectric little table with two forward and one rotary degrees of freedom for submicronic lithographic systems // Devices for scientific researches, 1989.
7. Information technologies in designing objects of electronic mechanical engineering: the Monography. 5 books. Book 4. V.A.Vasin, E.N.Ivashov, A. U..Pavlov, S.V.Stepanchikov. Information technology in designing scanners for probe microscopes. – М.: Publishing house of scientific research institute PMT, 2011. – 253 p.
8. Rainkshks K., Ushakov I.A. Estimation of systems’ reliability with use of graphs. – М.: Radio and communication, 1988.
9. Kleinrok L. The queuing theory. – М.: Mechanical engineering, 1979.
10. Slobodin M.Y., Zarev R.U. Computer support of multiattributive methods of choice and decisionmaking at designing corporate information-managerial systems. – St. Petersburg: Info., 2004. – 223p.
Review
For citations:
Vasin V.A., Ivashov E.N., Stepanchikov S.V. RELIABILITY OF PIEZOELECTRIC SCANNERS IN PROBE MICROSCOPY. Dependability. 2013;(1):92-114. https://doi.org/10.21683/1729-2646-2013-0-1-92-114
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ISSN 1729-2646 (Print)
ISSN 2500-3909 (Online)
ISSN 2500-3909 (Online)
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